systems click here for Japanese
With the foundation of ultrahigh vacuum technology cultivated over the years, we have been provided our products to research institutions and companies. The high-level technologies of our company have actively engaged in various fields. Please tell us your specifications, and we will manufacture systems that meet your needs. Please contact us for details of each system.
Based on the collaborative research with NATIONAL INSTITUTE OF ADVANCED
INDUSTRIAL SCIENCE AND TECHNOLOGY (AIST), we developed the cryostat
for superconducting detectors. The system has the structure that
can quickly cool down from room temperature to liquid helium temperature
so that an experiment can be started in a shorter time. Also, unlike the
conventional cryostats using liquid helium, there is no limit for the operation
time of the system. So it can be used longer operations.
By mounting the newly-developed cryo-finger, we successfully put a cryogenic unit on the outside of the cryostat. Measurement can be done by attaching a superconducting detector at the tip of the cryo-finger and insert the superconducting detector into the inside of an analyzer, etc. The system is designed to have almost the same temperatures between the cryogenic unit inside the cryostat and the mounted position of the superconducting detector. During the maintenance, the superconducting detector can be pulled out by a moving table attached to the cryostat.
Because vibrations from a refrigerating equipment or compressor cause adverse effect on the detection sensitivity of the superconducting detector, we adopted the vibration-free mechanism necessary to remove vibrations.
he newly-developed Cryostat for Superconducting Detectors is expected various applications in different equipment such as mass analyzer, X-ray detector and medical devices.
If you are interested in the system, please feel free to contact us. (Patent pending)
⇒ <more details>
In UHV condition, the system forms a film by heating up a sample in an evaporation source. A K-cell for solid substances, gas-cell or laser, etc. is used as the evaporation source. With high precision substrate rotation and heating mechanisms, it can conduct stable epitaxial growth. (MAX 1200℃)
With its two-chamber structure of a load lock chamber and film forming chamber, the substrate can be changed without releasing air while keeping the film forming chamber in UHV condition. Please consult us for details.
In HV/UHV condition, the system conducts vacuum deposition to a substrate by heating up a sample in an evaporation source. An EB gun, resistance heating, etc. is used as the evaporation source. With substrate rotation and heating mechanisms, it can conduct stable film forming. (MAX 1200℃)
With its two-chamber structure of a load lock chamber and vacuum deposition chamber, the substrate can be changed without releasing air while keeping the vacuum deposition chamber in UHV condition. Please consult us for details.
The system can conduct single-/multi-source sputtering with a sputter cathode. It can be used for a target made of magnetic material. We will suggest the most suitable sputter cathode that can be used for your target material. With substrate rotation and heating mechanisms, it can conduct high precision, stable film forming.
With its two-chamber structure of a load lock chamber and sputter chamber, the substrate can be changed without releasing air while keeping the sputter chamber in vacuum condition. Please consult us for details.
This is the cooling cryostat using liquid helium. A sample is placed in UHV inside of the cryostat and transferred from the room temperature section to the end of the cryogenic section by a transfer mechanism. The system has the structure that minimizes the inflow of heat.
All connecting sections have the metal seal structure to ensure UHV environment. To obtain extra cryogenic condition, it is necessary to lower the temperature by using impedance of the 1K pot. By using 3He, extra cryogenic condition can be achieved.
This system is used for supplying 3He/4He gas to a cooling cryostat and making the internal cryostat high vacuum condition. It also controls 3He/4He gas to obtain the cryogenic condition. Piping components uses metal seals to prevent the costly 3He gas from leaking. The system also has vibration absorption mechanism to reduce vibrations caused by a vacuum pump. With the touch panel, it enables the semiautomatic operation without any concerns of incorrect operations caused by operation mistakes.
We manufacture various superconducting magnets. We also can design and manufacture that meets your purpose. Please consult us for details.
We design and manufacture UHV exhaust systems. Depending on use applications, we can select pumps and suggest types of structures/vacuum gauges. Both round and rectangular chambers are available.
We can design/manufacture the system depending on your use applications. So please consult us for details.
UHV Heating Systems
The purpose of this system is the degassing of vacuum components, samples, etc. by vacuum heating. By heating in 150 - 200℃, it removes gas molecules in materials and enables faster exhaust into UHV.
We can design/manufacture the system that meets your purpose. So please consult us for details.
Beam Line Systems
We design/manufacture vacuum systems for various beam lines. We can suggest the system that meets your purpose, such as electron beam, ion beam and SOR beam.